Zeiss Gemini 500
Cryo-field emission-variable pressure SEM (cryo-FE-VPSEM) of the latest generation equipped with the full cryogenic system manufactured by Leica, and allowing for low-temperature observations down to -150°C. The equipment includes in-lens SE and BSE detectors for high-resolution (<0.8 nm) low voltage (<100 V) surface and compositional imaging, and side-mounted detectors for SE, low-vacuum SE, BSE and STEM (BF, DF, and HAADF) imaging. The instrumentation is complemented by the 150 mm2 SDD-EDX X-Max detector released by Oxford Instruments.
The schedule for the Zeiss Gemini 500 SEM can be checked here. For bookings, EPFL and cryo users are invited to email Louise Jensen, while UNIL and non-cryo users will have to contact Pierre Vonlanthen.
Tescan Mira II LMU
Field emission (Shottky-FE) SEM equipped with SE, in-lens SE and BSE detectors. EDX and EBSD analyses are performed using a Penta-FET 3x detector and a Nordlys S camera, respectively, both being monitored by the AZtec 2.4 software package released by Oxford Instruments. This instrument also allows for low-vacuum BSE observations up to 50 Pa.
SEM equipped with a standard thermionic source (W filament). The instrument is used for everyday SE, low-vacuum SE and BSE imaging, as well as for panchromatic cathodoluminescence (pan-CL) imaging. The instrumentation also includes a Penta-FET EDX detector released by Oxford Instruments, and the SEM microtomographic equipment (SEM micro-CT) manufactured by Bruker for 3D volumetric analyses.